Six-Degree-of-Freedom Posture Measurement Technologies Using Position Sensitive Detectors (PSDs): State of the Art

Xiangxu Meng; Siwei Sun; Xuetao Yan; Fengman Liu; Liqiang Cao; Qidong Wang; Yu Sun

doi:10.3390/mi13111903

Micromachines (Nov 2022)

Six-Degree-of-Freedom Posture Measurement Technologies Using Position Sensitive Detectors (PSDs): State of the Art

Xiangxu Meng,
Siwei Sun,
Xuetao Yan,
Fengman Liu,
Liqiang Cao,
Qidong Wang,
Yu Sun

Affiliations

Xiangxu Meng: System Packaging and Integration Research Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
Siwei Sun: System Packaging and Integration Research Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
Xuetao Yan: System Packaging and Integration Research Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
Fengman Liu: System Packaging and Integration Research Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
Liqiang Cao: System Packaging and Integration Research Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
Qidong Wang: System Packaging and Integration Research Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
Yu Sun: System Packaging and Integration Research Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China

DOI: https://doi.org/10.3390/mi13111903
Journal volume & issue: Vol. 13, no. 11
p. 1903

Abstract

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Six degree-of-freedom (6-DOF) posture measurement is an important academic research topic which has been broadly applied in many fields. As a high-speed photoelectronic sensor with ultra-high resolution and precision, position sensitive detector (PSD) has shown to be one of the most competitive candidates in 6-DOF measurement. This review presents the research progress of PSD-based 6-DOF posture measurement systems in the field of large-scale equipment assembly, ultra-precision manufacturing and other emerging areas. A total of six methods for implementing 6-DOF measurement are summarized and their advantages and limitations are discussed. Meanwhile, the paper illustrates challenges, potential solutions and future development trends.

Published in Micromachines

ISSN: 2072-666X (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Mechanical engineering and machinery
Website: https://www.mdpi.com/journal/micromachines

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