Synthesis of Carbon Nanotubes Growth Using FeCl3 / Ethanol Catalyst by CVD Method

Abstract

Carbon nanotubes (CNTs) were grown by chemical vapor deposition (CVD) method. FeCl3 was used as the precursor of iron which acts as the catalyst .Solution of FeCl3 in ethanol at concentration of (0.05 mole/litter) has been chosen. Silicon (100) substrates were spin- coated with the prepared catalyst solution (FeCl3) .Carbon nanotubes were grown on Si (100) substrate coated with catalyst in tube furnace using argon and acetylene gases at temperature of 750°C for 30 minutes. The structures of the produced material were characterized with Raman spectroscopy and FESEM. Raman spectra showed MWCNTs with the presence of radial breathing mode (RBM) at low frequency. The morphology of carbon nanotubes called noodles–like CNTs with an average diameter of 45nm was observed with FESEM micrograph.

Keywords

• carbon nanotubes
• chemical vapor deposition
• fecl