Systematic Characterization of Plasma-Etched Trenches on 4H-SiC Wafers

• Massimo D. Pirnaci,
• Luca Spitaleri,
• Dario Tenaglia,
• Francesco Perricelli,
• Maria Elena Fragalà,
• Corrado Bongiorno,
• Antonino Gulino

Affiliations

Massimo D. Pirnaci

STMicroelectronics, Catania, Italy

Luca Spitaleri

Department of Chemical Sciences, University of Catania, Catania, Italy

Dario Tenaglia

STMicroelectronics, Catania, Italy

Francesco Perricelli

Department of Chemical Sciences, University of Catania, Catania, Italy

Maria Elena Fragalà

Department of Chemical Sciences, University of Catania, Catania, Italy

Corrado Bongiorno

CNR-IMM, Catania, Italy

Antonino Gulino

Department of Chemical Sciences, University of Catania, Catania, Italy