Temperature and humidity sensor based on MEMS technology
Dongyan Zhao,
Yubo Wang,
Jin Shao,
Peng Zhang,
Yanning Chen,
Zhen Fu,
Shuaipeng Wang,
Wenlong Zhao,
Zhimei Zhou,
Yuandong Yuan,
Dengyuan Fu,
Yinfang Zhu
Affiliations
Dongyan Zhao
National and Local Joint Engineering Research Center for Reliability Technology of Energy Internet Intelligent Terminal Core Chip, Beijing Smart-Chip Microelectronics Technology Co., Ltd., Beijing 100192, China
Yubo Wang
National and Local Joint Engineering Research Center for Reliability Technology of Energy Internet Intelligent Terminal Core Chip, Beijing Smart-Chip Microelectronics Technology Co., Ltd., Beijing 100192, China
Jin Shao
National and Local Joint Engineering Research Center for Reliability Technology of Energy Internet Intelligent Terminal Core Chip, Beijing Smart-Chip Microelectronics Technology Co., Ltd., Beijing 100192, China
Peng Zhang
National and Local Joint Engineering Research Center for Reliability Technology of Energy Internet Intelligent Terminal Core Chip, Beijing Smart-Chip Microelectronics Technology Co., Ltd., Beijing 100192, China
Yanning Chen
National and Local Joint Engineering Research Center for Reliability Technology of Energy Internet Intelligent Terminal Core Chip, Beijing Smart-Chip Microelectronics Technology Co., Ltd., Beijing 100192, China
Zhen Fu
National and Local Joint Engineering Research Center for Reliability Technology of Energy Internet Intelligent Terminal Core Chip, Beijing Smart-Chip Microelectronics Technology Co., Ltd., Beijing 100192, China
Shuaipeng Wang
National and Local Joint Engineering Research Center for Reliability Technology of Energy Internet Intelligent Terminal Core Chip, Beijing Smart-Chip Microelectronics Technology Co., Ltd., Beijing 100192, China
Wenlong Zhao
National and Local Joint Engineering Research Center for Reliability Technology of Energy Internet Intelligent Terminal Core Chip, Beijing Smart-Chip Microelectronics Technology Co., Ltd., Beijing 100192, China
Zhimei Zhou
National and Local Joint Engineering Research Center for Reliability Technology of Energy Internet Intelligent Terminal Core Chip, Beijing Smart-Chip Microelectronics Technology Co., Ltd., Beijing 100192, China
Yuandong Yuan
National and Local Joint Engineering Research Center for Reliability Technology of Energy Internet Intelligent Terminal Core Chip, Beijing Smart-Chip Microelectronics Technology Co., Ltd., Beijing 100192, China
Dengyuan Fu
Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Yinfang Zhu
Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
This work presents a monolithically integrated temperature and humidity sensor based on microelectromechanical systems technology. The temperature sensor working on the “bi-metallic” effect has the advantages of wide temperature range, high sensitivity, and fast detection. The humidity sensor has a polyimide parallel plate capacitive structure with the microporous array on the upper electrode designed for high sensitivity and fast response. Numerical analysis and COMSOL simulation showed that the temperature detection sensitivity is 0.2 mV/°C in the range of 193–393 K and humidity sensitivity is 0.405 pF/% relative humidity (RH) with the response time of 34 s in the humidity range of 0%–100% RH. The integrated temperature and humidity sensor has the advantages of small dimension, wide detection range, high precision, and fast response.
