Circular SAW Resonators: Influence of Sensitive Element Dimensions on Strength Characteristics and First Experimental Samples
Sergey Yu. Shevchenko,
Denis A. Mikhailenko,
Alexander S. Kukaev,
Vladimir Yu. Venediktov
Affiliations
Sergey Yu. Shevchenko
Department of Laser Measuring and Navigation Systems, Faculty of Information Measurement and Biotechnical Systems, Saint Petersburg Electrotechnical University (LETI), Popova Str., h. 5, 197376 Saint Petersburg, Russia
Denis A. Mikhailenko
Department of Laser Measuring and Navigation Systems, Faculty of Information Measurement and Biotechnical Systems, Saint Petersburg Electrotechnical University (LETI), Popova Str., h. 5, 197376 Saint Petersburg, Russia
Alexander S. Kukaev
Department of Laser Measuring and Navigation Systems, Faculty of Information Measurement and Biotechnical Systems, Saint Petersburg Electrotechnical University (LETI), Popova Str., h. 5, 197376 Saint Petersburg, Russia
Vladimir Yu. Venediktov
Department of Laser Measuring and Navigation Systems, Faculty of Information Measurement and Biotechnical Systems, Saint Petersburg Electrotechnical University (LETI), Popova Str., h. 5, 197376 Saint Petersburg, Russia
In preceding research endeavors, the frequency characteristics of a ring resonator on surface acoustic waves made of various materials were studied. Investigations encompassed fixation techniques within the housing, the impact of external variables on these components, and the most efficient configuration of the interdigital transducer within the ring resonator to curtail bandwidth. This current study is dedicated to investigating the correlation between sensitivity and the highest measurable acceleration concerning the dimensions of these sensitive elements. Furthermore, it involves assessing the attributes of produced experimental samples to verify the simulation results. The results obtained represent the possibility of creating a micromechanical accelerometer that can be used in the automotive industry as a g-sensor shock, as well as in industries where the numerical value of high overloads is required.
