Journal of Materials Research and Technology (Mar 2025)
High-strength Au–Au bonding for temperature and pressure integrated sensor
- Mimi Huang,
- Yong Xia,
- Xiangguang Han,
- Yi Gao,
- Shuai Chen,
- Zeyu Cui,
- Cheng Zhang,
- Yushan Gao,
- Zhixia Qiao,
- Yang Lv,
- Xiaowei Hou,
- Chenying Wang,
- Ping Yang,
- Libo Zhao
Affiliations
- Mimi Huang
- State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an, 710049, China; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China
- Yong Xia
- State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an, 710049, China; School of Instrument Science and Technology, Xi'an Jiaotong University, Xi'an, 710049, China; Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing, Yantai, 265503, China; State Industry-Education Integration Center for Medical Innovations at Xi'an Jiaotong University, Xi'an, 710049, China; Corresponding author. State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an, 710049, China.
- Xiangguang Han
- State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an, 710049, China; School of Instrument Science and Technology, Xi'an Jiaotong University, Xi'an, 710049, China; Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing, Yantai, 265503, China; State Industry-Education Integration Center for Medical Innovations at Xi'an Jiaotong University, Xi'an, 710049, China
- Yi Gao
- State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an, 710049, China; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China
- Shuai Chen
- State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an, 710049, China; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China
- Zeyu Cui
- State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an, 710049, China; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China
- Cheng Zhang
- State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an, 710049, China; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China
- Yushan Gao
- Xi'an Aerospace Propulsion Institute, Xi'an, 710049, China
- Zhixia Qiao
- School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China; Xi'an Aerospace Propulsion Institute, Xi'an, 710049, China
- Yang Lv
- Ningbo CRRC Times Transducer Technology Co., LTD, Ningbo, 315000, China
- Xiaowei Hou
- Ningbo CRRC Times Transducer Technology Co., LTD, Ningbo, 315000, China
- Chenying Wang
- State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an, 710049, China; School of Instrument Science and Technology, Xi'an Jiaotong University, Xi'an, 710049, China; State Industry-Education Integration Center for Medical Innovations at Xi'an Jiaotong University, Xi'an, 710049, China
- Ping Yang
- State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an, 710049, China; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China
- Libo Zhao
- State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an, 710049, China; School of Instrument Science and Technology, Xi'an Jiaotong University, Xi'an, 710049, China; Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing, Yantai, 265503, China; State Industry-Education Integration Center for Medical Innovations at Xi'an Jiaotong University, Xi'an, 710049, China; Corresponding author. State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an, 710049, China.
- Journal volume & issue
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Vol. 35
pp. 1239 – 1249
Abstract
With the development of intelligent and integrated electronic devices, leadless integrated sensors have a broad development. One of the most critical processes in TSV (Through Silicon Via) leadless packaging is Au–Au bonding, which the bond strength determines the success or failure of sensor preparation. In this research, the effect of the bonding temperature on the bonding strength was studied for the designed the temperature and pressure integrated sensor. To further increase the bonding strength, plasma treatment of the metal surface was applied. The influence of various plasma atmospheres and treatment times on the surface morphology, surface hydrophilicity, chemical state and the bonding rate were studied. And bonding interfaces under different bonding conditions were characterized. Finally, after 120 s of O2 plasma treatment and bonding for 1 h at 450 °C and 4000 mbar, the bond strength was increased by 68%, reaching 27 MPa, which enhances the feasibility of the preparation of temperature and pressure integrated sensors.
