Experimental Control of Preparation of Thin Film and Fine Particles by CVD [Translated]†

Abstract

The formation of TiO2 thin film and fine particles by the thermal decomposition of titanium tetraisopropoxide (TTIP)vapor was carried out experimentally using a laminar-flow aerosol reactor (LFAR). TTIP vapor and He gas mixture was introduced into a heated pipe in a laminar flow, and the thin films formed and the particles deposited on the pipe wall were observed using an electron microscope under various supplied concentrations of TTIP vapor, reactor temperatures and operating pressure inside the reactor It has been found that the generation of fine particles is enhanced at higher concentration of TTIP vapor, higher reaction temperature and higher pressure, but the formation of thin films is more enhanced lower pressure. The observed trends agreed qualitatively with the simulation results obtained by numerically solving the aerosol dynamic equation where the particle formation was evaluated by a simplified reaction and coagulation model.† This report was originally printed in KAGAKU KOGAKU RONBUNSHU, 16(3), 535-542 (1990) in Japanese, before being translated into English by KONA Editorial Committee with the permission of the editorial committee of the Soc. Chemical Engineers, Japan.