Micromachined Thermal Flow Sensors—A Review

Abstract

Microfabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry, <em>etc.</em> This paper reviews the theory of thermal flow sensing and the different configurations and operation modes available. Material properties relevant to micromachined thermal flow sensing and selection criteria are also presented. Finally, recent applications of micromachined thermal flow sensors are presented. Detailed tables of the reviewed devices are included.

Keywords

• MEMS
• thermal flow sensors
• TCR
• anemometry
• thermoresistive
• thermoelectric
• thermoelectronic
• frequency analog
• gas flow
• fluid flow