Micromachined Thermal Flow Sensors—A Review

Micromachines. 2012;3(3):550-573 DOI 10.3390/mi3030550

 

Journal Homepage

Journal Title: Micromachines

ISSN: 2072-666X (Online)

Publisher: MDPI AG

LCC Subject Category: Technology: Mechanical engineering and machinery

Country of publisher: Switzerland

Language of fulltext: English

Full-text formats available: PDF, HTML, ePUB, XML

 

AUTHORS

Jonathan T. W. Kuo
Ellis Meng
Lawrence Yu

EDITORIAL INFORMATION

Blind peer review

Editorial Board

Instructions for authors

Time From Submission to Publication: 11 weeks

 

Abstract | Full Text

Microfabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry, <em>etc.</em> This paper reviews the theory of thermal flow sensing and the different configurations and operation modes available. Material properties relevant to micromachined thermal flow sensing and selection criteria are also presented. Finally, recent applications of micromachined thermal flow sensors are presented. Detailed tables of the reviewed devices are included.