Micromachines (Jul 2012)

Micromachined Thermal Flow Sensors—A Review

  • Jonathan T. W. Kuo,
  • Ellis Meng,
  • Lawrence Yu

DOI
https://doi.org/10.3390/mi3030550
Journal volume & issue
Vol. 3, no. 3
pp. 550 – 573

Abstract

Read online

Microfabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry, <em>etc.</em> This paper reviews the theory of thermal flow sensing and the different configurations and operation modes available. Material properties relevant to micromachined thermal flow sensing and selection criteria are also presented. Finally, recent applications of micromachined thermal flow sensors are presented. Detailed tables of the reviewed devices are included.

Keywords