TEM EDS analysis of epitaxially-grown self-assembled indium islands

Abstract

Epitaxially-grown self-assembled indium nanostructures, or islands, show promise as nanoantennas. The elemental composition and internal structure of indium islands grown on gallium arsenide are explored using Transmission Electron Microscopy (TEM) Energy Dispersive Spectroscopy (EDS). Several sizes of islands are examined, with larger islands exhibiting high (>94%) average indium purity and smaller islands containing inhomogeneous gallium and arsenic contamination. These results enable more accurate predictions of indium nanoantenna behavior as a function of growth parameters.