Optimization Design Method for the CMOS-type Capacitive Micro-Machined Ultrasonic Transducer

Abstract

In this study, an integrated modeling technique for characterization and optimization design of the complementary metal-oxide-semiconductor (CMOS) capacitive micro-arrayed ultrasonic transducer (pCMOS-CMUT) is presented. Electromechanical finite element simulations are performed to investigate its operational characteristics, such as the collapse voltage and the resonant frequency. Both the numerical and experimental results are in good agreement. In order to simultaneously customize the resonant frequency and minimize the collapse voltage, the genetic algorithm (GA) is applied to optimize dimensional parameters of the transducer. From the present results, it is concluded that the FE/GA coupling approach provides another efficient numerical tool for multi-objective design of the pCMOS-CMUT.

Keywords

• CMOS
• CMUT
• Finite element method
• Optimization