InGaN/GaN nanoLED Arrays as a Novel Illumination Source for Biomedical Imaging and Sensing Applications
Jan Gülink,
Steffen Bornemann,
Hendrik Spende,
Matthias Auf der Maur,
Aldo Di Carlo,
Joan Daniel Prades,
Hutomo Suryo Wasisto,
Andreas Waag
Affiliations
Jan Gülink
Institute of Semiconductor Technology (IHT) and Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, D-38106 Braunschweig, Germany
Steffen Bornemann
Institute of Semiconductor Technology (IHT) and Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, D-38106 Braunschweig, Germany
Hendrik Spende
Institute of Semiconductor Technology (IHT) and Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, D-38106 Braunschweig, Germany
Matthias Auf der Maur
Department of Electronic Engineering, Universitá degli Studi di Roma “Tor Vergata”, I-00133 Rome, Italy
Aldo Di Carlo
Department of Electronic Engineering, Universitá degli Studi di Roma “Tor Vergata”, I-00133 Rome, Italy
Joan Daniel Prades
MIND-IN2UB, Department Electronic and Biomedical Engineering, University of Barcelona, E-80124 Barcelona, Spain
Hutomo Suryo Wasisto
Institute of Semiconductor Technology (IHT) and Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, D-38106 Braunschweig, Germany
Andreas Waag
Institute of Semiconductor Technology (IHT) and Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, D-38106 Braunschweig, Germany
Guidelines for the fabrication of nanoscale light-emitting diode arrays (i.e., nanoLED arrays) based on patterned gallium nitride (GaN) with very small dimensions and pitches have been derived in this work. Several challenges during top-down LED array processing have been tackled involving hybrid etching and polymer-based planarization to yield completely insulated highaspect-ratio LED fin structures and support the creation of p-GaN crossing line contacts, respectively. Furthermore, simulations of the light emission patterns were also performed providing hints for enhancing the device designs. As a result, regardless of the required device processing optimization, the developed nanoLED arrays are expected to offer high potential as novel illumination sources in biomedical imaging and sensing applications (e.g., mini compact microscopes and wearable biological/chemical nanoparticle counters)
