Micromachines (May 2024)

Modeling and Experiments on Temperature and Electrical Conductivity Characteristics in High-Temperature Heating of Carbide-Bonded Graphene Coating on Silicon

  • Lihua Li,
  • Ruiying Wang,
  • Yingwei Huang,
  • Xingbang Li

DOI
https://doi.org/10.3390/mi15060673
Journal volume & issue
Vol. 15, no. 6
p. 673

Abstract

Read online

A novel non-isothermal glass hot embossing system utilizes a silicon mold core coated with a three-dimensional carbide-bonded graphene (CBG) coating, which acts as a thin-film resistance heater. The temperature of the system significantly influences the electrical conductivity properties of silicon with a CBG coating. Through simulations and experiments, it has been established that the electrical conductivity of silicon with a CBG coating gradually increases at lower temperatures and rapidly rises as the temperature further increases. The CBG coating predominantly affects electrical conductivity until 400 °C, after which silicon becomes the dominant factor. Furthermore, the dimensions of CBG-coated silicon and the reduction of CBG coating also affect the rate and outcome of conductivity changes. These findings provide valuable insights for detecting CBG-coated silicon during the embossing process, improving efficiency, and predicting the mold core’s service life, thus enhancing the accuracy of optical lens production.

Keywords