Fabry-Perot Diaphragm Fiber Optic Sensor (DFOS) for Acoustic Detection

Abstract

A diaphragm fiber optic sensor (DFOS) solely based on Fabry-Perot multiple beam interference has been designed and fabricated with micro-electric mechanical system (MEMS) technology. The silicon diaphragm with an embossed center was designed with an interference gap width kept accurately. The DFOS was verified to be a truly and purely Fabry-Perot device via a critical test. Parallel testing with a Piezoelectric (PZT) sensor showed that the DFOS had high sensitivity. The Fabry-Perot DFOS also demonstrated excellent performance in on-line monitoring of Partial Discharge (PD) in power transformers.

Keywords

• MEMS
• Fabry-Perot
• Fiber optic
• Acoustic
• Diaphragm with embossed center