XPS ANALYSIS OF DIAMOND-LIKE CARBON FILMS

Abstract

The paper presents an analysis of the results of a study into diamond-like carbon films synthesized by plasma-chemical deposition from hydrocarbon sources: methane (СН4) and ethane (С2Н6). Analysis of the spectra of X-ray photoelectron spectroscopy was employed to study the effect that the synthesis conditions have on the structure and composition of amorphous carbon films.

Keywords

• аморфный гидрогенезированный углерод
• спектры рентгеновские фотоэлек-тронные
• микрокристаллический
• нанокристаллический
• ультрананокристаллический
• аморфный
• amorphous hydrogenised carbon
• x-ray photoelectron spectra
• microcrystalline
• nanocrystalline
• ultra-nanocrystalline
• amorphous