The vacuum process using small molecule-based organic materials to make organic photodiodes (OPDIs) will provide many promising features, such as well-defined molecular structure, large scalability, process repeatability, and good compatibility for CMOS integration, compared to the widely used Solution process. We present the performance of planar heterojunction OPDIs based on pentacene as the electron donor and C60 as the electron acceptor. In these devices, MoO3 and BCP interfacial layers were interlaced between the electrodes and the active layer as the electron- and hole-blocking layer, respectively. Typically, BCP played a good role in suppressing the dark current by two orders higher than that without that layer. These devices showed a significant dependence of the performance on the thickness of the pentacene. In particular, with the pentacene thickness of 25 nm, an external quantum efficiency at the 360 nm wavelength according to the peak absorption of C60 was enhanced by 1.5 times due to a cavity effect, compared to that of the non-cavity device. This work shows the importance of a vacuum processing approach based on small molecules for OPDIs, and the possibility of improving the performance via the optimization of the device architecture.