Design of hybrid MoS2/photonic devices compatible with technological constraints

Abstract

The integration of transition metal dichalcogenide layers into photonic devices is a current challenge in the field of 2D materials. Based on numerical simulations, this work explores the design of devices combining an MoS _2 monolayer with planar photonic gratings sustaining localized optical resonances. A special attention is paid to the technological constraints. The optical response of six devices is compared taking into account the limitations imposed by the growth conditions of the MoS _2 layer and the processing of the resonant optical gratings. The reported photonic devices composed of grating filters and a backside reflector on silicon and silica substrates exhibit a theoretical absorption by the MoS _2 layer between 85 and 99% at 532 nm. The numerical simulations further show that the addition of an Al _2 O _3 encapsulation layer, to protect the MoS _2 monolayer, results in an increase of the performance of the devices. These hybrid MoS _2 based photonic devices are promising technological platforms for the study of the optical properties of integrated MoS _2 monolayers.

Keywords

• MoS2 monolayer
• photonic
• optical cavities
• resonant gratings
• 2D materials
• integration