Electrochemical micro-machining based on double feedback circuits

Abstract

Abstract Pulsed electrochemical micromachining accuracy predominantly depends on pulse duration. To obtain high accuracy, an expensive power source with ultra-short pulse duration is needed. An electrochemical micromachining method based on double feedback circuits is proposed in this work to achieve this aim. A positive feedback circuit plus a negative feedback circuit is used in the circuit of the pulsed electrochemical micromachining. Thus, the gains of the feedback circuits can control the pulse duration of the machining system. Experiments show that the machining resolution can be improved notably by an increase in the feedback gains. Using the method, one micro double cure beam is produced, and its accuracy gets to nanometer level under the condition of using an ordinary pulse duration power source.