Sensors (Aug 2014)

Laser-Machined Microcavities for Simultaneous Measurement of High-Temperature and High-Pressure

  • Zengling Ran,
  • Shan Liu,
  • Qin Liu,
  • Ya Huang,
  • Haihong Bao,
  • Yanjun Wang,
  • Shucheng Luo,
  • Huiqin Yang,
  • Yunjiang Rao

DOI
https://doi.org/10.3390/s140814330
Journal volume & issue
Vol. 14, no. 8
pp. 14330 – 14338

Abstract

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Laser-machined microcavities for simultaneous measurement of high-temperature and high-pressure are demonstrated. These two cascaded microcavities are an air cavity and a composite cavity including a section of fiber and an air cavity. They are both placed into a pressure chamber inside a furnace to perform simultaneous pressure and high-temperature tests. The thermal and pressure coefficients of the short air cavity are ~0.0779 nm/°C and ~1.14 nm/MPa, respectively. The thermal and pressure coefficients of the composite cavity are ~32.3 nm/°C and ~24.4 nm/MPa, respectively. The sensor could be used to separate temperature and pressure due to their different thermal and pressure coefficients. The excellent feature of such a sensor head is that it can withstand high temperatures of up to 400 °C and achieve precise measurement of high-pressure under high temperature conditions.

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