Improvement and Optimization of Electromagnetic Integrated Scanning Micromirror

Abstract

In this paper, the effect of driving system on working performance of electromagnetic integrated scanning micromirror (ISM) is studied. To further improve the optimization design of the electromagnetic ISM, the detailed theoretical analysis, simulation analysis, and experimental test are carried out, respectively. By changing the force form and external magnetic field of the device, the mechanical scanning angle, driving voltage, and resonant frequency of the electromagnetic ISM will be changed accordingly, and then the change of the working performance of the ISM is explored. Through the optimization analysis and comparative test, the optimal design scheme of driving system is obtained, and the effect of driving system on the working performance of the electromagnetic ISM is verified. The experimental results show that by optimizing the structure of the driving system, the mechanical scanning angle of the electromagnetic ISM is increased by about 20%, and the driving voltage is decreased about 10% observably, and the working performance of the electromagnetic ISM is significantly improved. The research results have important significance and practical application value for the extended application of the electromagnetic ISM in the field of optical detection.

Keywords

• driving system
• integrated scanning micromirror
• driving voltage
• mechanical scanning angle