Application of Thin ZnO ALD Layers in Fiber-Optic Fabry-Pérot Sensing Interferometers
Daria Majchrowicz,
Marzena Hirsch,
Paweł Wierzba,
Michael Bechelany,
Roman Viter,
Małgorzata Jędrzejewska‑Szczerska
Affiliations
Daria Majchrowicz
Department of Metrology and Optoelectronics, Faculty of Electronics, Telecommunications and Informatics, Gdańsk University of Technology, Narutowicza Street 11/12, Gdańsk 80-233, Poland
Marzena Hirsch
Department of Metrology and Optoelectronics, Faculty of Electronics, Telecommunications and Informatics, Gdańsk University of Technology, Narutowicza Street 11/12, Gdańsk 80-233, Poland
Paweł Wierzba
Department of Metrology and Optoelectronics, Faculty of Electronics, Telecommunications and Informatics, Gdańsk University of Technology, Narutowicza Street 11/12, Gdańsk 80-233, Poland
Michael Bechelany
Institut Européen des Membranes, UMR-5635, Université de Montpellier, The École Nationale Supérieure de Chimie de Montpellier, Centre national de la recherche scientifique, Place Eugène Bataillon, Montpellier 34095, France
Roman Viter
Institute of Atomic Physics and Spectroscopy, University of Latvia, 19 Raina Blvd., Riga LV-1586, Latvia
Małgorzata Jędrzejewska‑Szczerska
Department of Metrology and Optoelectronics, Faculty of Electronics, Telecommunications and Informatics, Gdańsk University of Technology, Narutowicza Street 11/12, Gdańsk 80-233, Poland
In this paper we investigated the response of a fiber-optic Fabry-Pérot sensing interferometer with thin ZnO layers deposited on the end faces of the optical fibers forming the cavity. Standard telecommunication single-mode optical fiber (SMF-28) segments were used with the thin ZnO layers deposited by Atomic Layer Deposition (ALD). Measurements were performed with the interferometer illuminated by two broadband sources operating at 1300 nm and 1550 nm. Reflected interference signal was acquired by an optical spectrum analyzer while the length of the air cavity was varied. Thickness of the ZnO layers used in the experiments was 50 nm, 100 nm, and 200 nm. Uncoated SMF-28 fiber was also used as a reference. Based on the results of measurements, the thickness of the ZnO layers and the length of the cavity were selected in order to achieve good visibility. Following, the interferometer was used to determine the refractive index of selected liquids.
