Characterization of Volume Gratings Based on Distributed Dielectric Constant Model Using Mueller Matrix Ellipsometry

Abstract

Volume grating is a key optical component due to its comprehensive applications. Other than the common grating structures, volume grating is essentially a predesigned refractive index distribution recorded in materials, which raises the challenges of metrology. Although we have demonstrated the potential application of ellipsometry for volume grating characterization, it has been limited due to the absence of general forward model reflecting the refractive index distribution. Herein, we introduced a distributed dielectric constant based rigorous coupled-wave analysis (RCWA) model to interpret the interaction between the incident light and volume grating, with which the Mueller matrix can be calculated. Combining with a regression analysis with the objective to match the measured Mueller matrices with minimum mean square error (MSE), the parameters of the dielectric constant distribution function can be determined. The proposed method has been demonstrated using a series of simulations of measuring the volume gratings with different dielectric constant distribution functions. Further demonstration has been carried out by experimental measurements on volume holographic gratings recorded in the composite of polymer and zinc sulfide (ZnS) nanoparticles. By directly fitting the spatiotemporal concentration of the nanoparticles, the diffusion coefficient has been further evaluated, which is consistent to the result reported in our previous investigations.

Keywords

• ellipsometry
• volume grating
• nanostructure metrology
• distributed dielectric constant model
• holography