Cold Laser Micro-Machining of PDMS as an Encapsulation Layer for Soft Implantable Neural Interface
Minjie Wang,
Yuan Zhang,
Jianxiong Bin,
Lan Niu,
Jing Zhang,
Lusheng Liu,
Aiping Wang,
Jin Tao,
Jingqiu Liang,
Lihua Zhang,
Xiaoyang Kang
Affiliations
Minjie Wang
Laboratory for Neural Interface and Brain Computer Interface, Engineering Research Center of AI & Robotics, Ministry of Education, Shanghai Engineering Research Center of AI & Robotics, MOE Frontiers Center for Brain Science, State Key Laboratory of Medical Neurobiology, Institute of AI and Robotics, Academy for Engineering and Technology, Fudan University, Shanghai 200433, China
Yuan Zhang
Laboratory for Neural Interface and Brain Computer Interface, Engineering Research Center of AI & Robotics, Ministry of Education, Shanghai Engineering Research Center of AI & Robotics, MOE Frontiers Center for Brain Science, State Key Laboratory of Medical Neurobiology, Institute of AI and Robotics, Academy for Engineering and Technology, Fudan University, Shanghai 200433, China
Jianxiong Bin
Ji Hua Laboratory, Foshan 528200, China
Lan Niu
Ji Hua Laboratory, Foshan 528200, China
Jing Zhang
Laboratory for Neural Interface and Brain Computer Interface, Engineering Research Center of AI & Robotics, Ministry of Education, Shanghai Engineering Research Center of AI & Robotics, MOE Frontiers Center for Brain Science, State Key Laboratory of Medical Neurobiology, Institute of AI and Robotics, Academy for Engineering and Technology, Fudan University, Shanghai 200433, China
Lusheng Liu
Laboratory for Neural Interface and Brain Computer Interface, Engineering Research Center of AI & Robotics, Ministry of Education, Shanghai Engineering Research Center of AI & Robotics, MOE Frontiers Center for Brain Science, State Key Laboratory of Medical Neurobiology, Institute of AI and Robotics, Academy for Engineering and Technology, Fudan University, Shanghai 200433, China
Aiping Wang
Laboratory for Neural Interface and Brain Computer Interface, Engineering Research Center of AI & Robotics, Ministry of Education, Shanghai Engineering Research Center of AI & Robotics, MOE Frontiers Center for Brain Science, State Key Laboratory of Medical Neurobiology, Institute of AI and Robotics, Academy for Engineering and Technology, Fudan University, Shanghai 200433, China
Jin Tao
State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
Jingqiu Liang
State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
Lihua Zhang
Laboratory for Neural Interface and Brain Computer Interface, Engineering Research Center of AI & Robotics, Ministry of Education, Shanghai Engineering Research Center of AI & Robotics, MOE Frontiers Center for Brain Science, State Key Laboratory of Medical Neurobiology, Institute of AI and Robotics, Academy for Engineering and Technology, Fudan University, Shanghai 200433, China
Xiaoyang Kang
Laboratory for Neural Interface and Brain Computer Interface, Engineering Research Center of AI & Robotics, Ministry of Education, Shanghai Engineering Research Center of AI & Robotics, MOE Frontiers Center for Brain Science, State Key Laboratory of Medical Neurobiology, Institute of AI and Robotics, Academy for Engineering and Technology, Fudan University, Shanghai 200433, China
PDMS (polydimethylsiloxane) is an important soft biocompatible material, which has various applications such as an implantable neural interface, a microfluidic chip, a wearable brain–computer interface, etc. However, the selective removal of the PDMS encapsulation layer is still a big challenge due to its chemical inertness and soft mechanical properties. Here, we use an excimer laser as a cold micro-machining tool for the precise removal of the PDMS encapsulation layer which can expose the electrode sites in an implantable neural interface. This study investigated and optimized the effect of excimer laser cutting parameters on the electrochemical impedance of a neural electrode by using orthogonal experiment design. Electrochemical impedance at the representative frequencies is discussed, which helps to construct the equivalent circuit model. Furthermore, the parameters of the equivalent circuit model are fitted, which reveals details about the electrochemical property of neural electrode using PDMS as an encapsulation layer. Our experimental findings suggest the promising application of excimer lasers in the micro-machining of implantable neural interface.
