Design, Fabrication, and Characterisation of a Label-Free Nanosensor for Bioapplications
Mario Alberto García-Ramírez,
Orfil González-Reynoso,
Miguel Angel Bello-Jiménez,
Everado Vargas-Rodríguez
Affiliations
Mario Alberto García-Ramírez
Electronics Department, Research Centre for Applied Science and Engineering, Universidad de Guadalajara, Blvd. Marcelino García Barragán 1421, Guadalajara 44430, Mexico
Orfil González-Reynoso
Chemistry Engineering Department, Research Centre for Applied Science and Engineering, Universidad de Guadalajara, Blvd. Marcelino García Barragán 1421, Guadalajara 44430, Mexico
Miguel Angel Bello-Jiménez
Departamento de Estudios Multidisciplinarios, División Campus Irapuato-Salamanca, Universidad de Guanajuato, Av. Universidad s/n, Col. Yacatitas, Yuriria, Guanajuato 38940, Mexico
Everado Vargas-Rodríguez
Instituto de Investigación en Comunicación Óptica (IICO), Universidad Autónoma de San Luis Potosí, Av. Karakorum No. 1470 Lomas 4<sup>a</sup> Secc., San Luis Potosí 78210, Mexico
In this paper, we present a hybrid semiconductor structure for biosensing applications that features the co-integration of nanoelectromechanical systems with the well-known metal oxide semiconductor technology. The proposed structure features an MOSFET as a readout element, and a doubly clamped beam that is isolated from the substrate by a thin air gap, as well as by a tunnel oxide layer. The beam structure is functionalised by a thin layer of biotargets, and the main aim is to detect a particular set of biomolecules, such as enzymes, bacteria, viruses, and DNA/RNA chains, among others. In here, a three-dimensional finite element analysis is performed in order to study the behaviour of the functionalised, doubly clamped beam. Preliminary results for the fabrication and characterisation processes show good agreement between the simulated and measured characteristics.
