Microsized subsurface modification of mono-crystalline silicon via non-linear absorption

Abstract

We introduce a novel method of optically inducing microsized subsurface structures using non-linear absorption of near infrared light in mono-crystalline silicon. We discuss the physical processes such as multi-photon absorption and self focussing in the material. The results presented in this paper demonstrate a new method of subsurface modifications in silicon and may open up novel avenues for optical devices embedded in silicon and optical process for the separation of wafers from their ingots.

Keywords

• silicon
• non-linear absorption
• opto-mechanical processes
• silicon photonics