Dual-control of incubation effect for efficiently fabricating surface structures in fused silica
Wang Zhi,
Xiang Zhikun,
Li Xiaowei,
Wu Mengnan,
Yi Peng,
Zhang Chao,
Yan Yihao,
Li Xibiao,
Zhang Xiangyu,
Wang Andong,
Huang Lingling
Affiliations
Wang Zhi
Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, No. 5, South Street, Zhongguancun, Beijing100081, China
Xiang Zhikun
Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, No. 5, South Street, Zhongguancun, Beijing100081, China
Li Xiaowei
Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, No. 5, South Street, Zhongguancun, Beijing100081, China
Wu Mengnan
Aviation Key Laboratory of Science and Technology on Advanced Corrosion and Protection for Aviation Material, AECC Beijing Institute of Aeronautical Materials, Beijing100095, China
Yi Peng
Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, No. 5, South Street, Zhongguancun, Beijing100081, China
Zhang Chao
Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, No. 5, South Street, Zhongguancun, Beijing100081, China
Yan Yihao
Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, No. 5, South Street, Zhongguancun, Beijing100081, China
Li Xibiao
Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, No. 5, South Street, Zhongguancun, Beijing100081, China
Zhang Xiangyu
Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, No. 5, South Street, Zhongguancun, Beijing100081, China
Wang Andong
Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, No. 5, South Street, Zhongguancun, Beijing100081, China
Huang Lingling
School of Optics and Photonics, Beijing Institute of Technology, Beijing, 100081, China
Fused silica with surface structures has potential applications in microfluidic, aerospace and other fields. To fabricate structures with high dimensional accuracy and surface quality is of paramount importance. However, it is indeed a challenge to strike a balance between accuracy and efficiency at the same time. Here, a temporally shaped femtosecond laser Bessel-beam-assisted etching method with dual-control of incubation effect is proposed to achieve this balance. Instead of layer-by-layer ablation continuously with Gaussian pulses, silica is modified discretely by double pulse Bessel beam with one single layer. During the modification process, incubation effect is dual-controlled in single shot process and spatial scanning process to generate even modified region efficiently. Then, the modified region is etched to form designed structures such as microholes, grooves, etc. The proposed method exhibits high efficiency for fabrication of surface structures in fused silica.
