Focused ion beam treatment of ZnO nanowires

Abstract

We investigated vapour-liquid-solid (VLS)-grown ZnO nanowires (NWs) on a Si sub- strate by scanning electron microscopy (SEM). Nanowires are found in a variety of shapes, surface properties and features, but seem to be all homogeneous inside. Darkish spots and areas on the surface are easily removed by a “gentle” focused ion beam (FIB) treatment. To unveil their deeper interior, we also applied FIB treatment. An overview of our results (SEM images) is given in this paper.