ACS Omega (Apr 2019)

Thin Film Analysis by Nanomechanical Infrared Spectroscopy

Andrea Casci Ceccacci,
Alberto Cagliani,
Paolo Marizza,
Silvan Schmid,
Anja Boisen

Affiliations

Andrea Casci Ceccacci: Department of Micro- and Nanotechnology, Technical University of Denmark, Kongens Lyngby, Denmark
Alberto Cagliani: Department of Micro- and Nanotechnology, Technical University of Denmark, Kongens Lyngby, Denmark
Paolo Marizza: Department of Micro- and Nanotechnology, Technical University of Denmark, Kongens Lyngby, Denmark
Silvan Schmid: Institute of Sensor and Actuator Systems, TU Wien, Vienna, Austria
Anja Boisen: Department of Micro- and Nanotechnology, Technical University of Denmark, Kongens Lyngby, Denmark

DOI: https://doi.org/10.1021/acsomega.9b00276
Journal volume & issue: Vol. 4, no. 4
pp. 7628 – 7635

Abstract

No abstracts available.

Published in ACS Omega

ISSN: 2470-1343 (Online)
Publisher: American Chemical Society
Country of publisher: United States
LCC subjects: Science: Chemistry
Website: https://pubs.acs.org/journal/acsodf

About the journal