ACS Omega
(Apr 2019)
Thin Film Analysis by Nanomechanical Infrared Spectroscopy
- Andrea Casci Ceccacci,
- Alberto Cagliani,
- Paolo Marizza,
- Silvan Schmid,
- Anja Boisen
Affiliations
- Andrea Casci Ceccacci
- Department of Micro- and Nanotechnology, Technical University of Denmark, Kongens Lyngby, Denmark
- Alberto Cagliani
- Department of Micro- and Nanotechnology, Technical University of Denmark, Kongens Lyngby, Denmark
- Paolo Marizza
- Department of Micro- and Nanotechnology, Technical University of Denmark, Kongens Lyngby, Denmark
- Silvan Schmid
- Institute of Sensor and Actuator Systems, TU Wien, Vienna, Austria
- Anja Boisen
- Department of Micro- and Nanotechnology, Technical University of Denmark, Kongens Lyngby, Denmark
- DOI
-
https://doi.org/10.1021/acsomega.9b00276
- Journal volume & issue
-
Vol. 4,
no. 4
pp.
7628
– 7635
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