Influence of purge, time of waiting and TiCl₄ dosing time in a low-pressure atomic layer deposition (ALD) reactor on properties of TiO₂ layer

Abstract

The aim of the study was to evaluate the influence of the ALD process parameters on mechanical properties and corrosion resistance of TiO2 layer. The TiO2 layer was deposited on stainless steel surfaces at constant temperature T = 200 °C and number of cycles nc = 500 (g ≈ 25 nm). The applied methodology consisted of potentiodynamic and impedance studies, as well as adhesion test. The obtained results were the basis for selection of surface treatment method for stainless steel implants for contact with blood. Appropriate parameters of surface treatment realized by means of the ALD method is of significant importance. It will contribute to the development of technological conditions of specified deposition parameters of TiO2 layers on steel implants.

Keywords

• 316LVM
• TiO₂
• ALD method
• electrochemical properties
• mechanical properties