Evaluation of coplanar line type thin film magnetic field sensor with narrow slits

Abstract

We have proposed coplanar line type thin-film magnetic field sensor with narrow slits. The slit is employed to flow more carrier current on the signal line by improving the impedance matching. Several sensors having 6, 10, 26, 36, and 50 μm slit widths were fabricated and evaluated from the phase and the amplitude of the transmission coefficient (S21) and reflection coefficient (S11) measured by the network analyzer. The amplitude of S21 with slit was improved about five times larger than the sensor without one at around 2 GHz. The appropriate slit width was evaluated as around 10 μm for the coplanar line type thin film magnetic field sensor and the sensitivity will enhance more than 10 times higher than the sensor without slits.