Micromachines (Jul 2021)

Carbon Dioxide Sensor Module Based on NDIR Technology

  • Libing Zhou,
  • Yaoyi He,
  • Qing Zhang,
  • Lei Zhang

DOI
https://doi.org/10.3390/mi12070845
Journal volume & issue
Vol. 12, no. 7
p. 845

Abstract

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In this paper, a gas detection system with an environmental compensation algorithm based on nondispersive infrared (NDIR) technology was designed. The prepared infrared pyroelectric detector was a dual-channel type based on the lithium tantalate (LiTaO3) wafer. The design of the optical gas chamber adopted a combination of two ellipsoids and a spherical top surface, which not only enhanced the coupling efficiency of the light propagation but also facilitated the miniaturization of the sensor module. In addition to this, a temperature and humidity compensation algorithm based on the least square method was proposed to make the measurement accuracy up to ±0.9% full scale (FS).

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