Realization of all two-dimensional Bravais lattices with metasurface-based interference lithography

Abstract

Proximity-field nanopatterning (PnP) have been used recently as a rapid, cost-effective, and large-scale fabrication method utilizing volumetric interference patterns generated by conformal phase masks. Despite the effectiveness of PnP processes, their design diversity has not been thoroughly explored. Here, we demonstrate that the possibility of generating any two-dimensional lattice with diverse motifs. By controlling the amplitude, phase, and polarization of each diffraction beam, we can implement all two-dimensional Bravais lattices in three-dimensional space. The results may provide diverse applications that require three-dimensional nanostructures from optical materials and structural materials to energy storage or conversion materials.

Keywords

• metasurface
• interference lithography
• proximity-field nanopatterning
• adjoint method