Sensors (Jun 2006)

Differential Laser Doppler based Non-Contact Sensor for Dimensional Inspection with Error Propagation Evaluation

  • Ketsaya Vacharanukul,
  • Samir Mekid

DOI
https://doi.org/10.3390/s6060546
Journal volume & issue
Vol. 6, no. 6
pp. 546 – 556

Abstract

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To achieve dynamic error compensation in CNC machine tools, a non-contactlaser probe capable of dimensional measurement of a workpiece while it is being machinedhas been developed and presented in this paper. The measurements are automatically fedback to the machine controller for intelligent error compensations. Based on a well resolvedlaser Doppler technique and real time data acquisition, the probe delivers a very promisingdimensional accuracy at few microns over a range of 100 mm. The developed opticalmeasuring apparatus employs a differential laser Doppler arrangement allowing acquisitionof information from the workpiece surface. In addition, the measurements are traceable tostandards of frequency allowing higher precision.

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