Sensors (Sep 2007)
Study of the origin of bending induced by bimetallic effect on microcantilever
Abstract
An analytical model for predicting the deflection and force of a bimaterialcantilever is presented. We introduce the clamping effect characterised by an axial loadupon temperature changes. This new approach predicts a non linear thermal dependence ofcantilever strain. A profilometry technique was used to measure the thermal strain.Comparison with experimental results is used to verify the model. The concordance of theanalytical model presented with experimental measurements is better than 10%
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