Author Correction: Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry

Affiliations

Ufuk Kilic: Department of Electrical and Computer Engineering, University of Nebraska-Lincoln
Alyssa Mock: Department of Electrical and Computer Engineering, University of Nebraska-Lincoln
Derek Sekora: Department of Electrical and Computer Engineering, University of Nebraska-Lincoln
Simeon Gilbert: Department of Physics and Astronomy, University of Nebraska-Lincoln
Shah Valloppilly: Nebraska Center for Materials and Nanoscience, University of Nebraska-Lincoln
Giselle Melendez: Department of Chemical Engineering, Polytechnic University of Puerto Rico
Natale Ianno: Department of Electrical and Computer Engineering, University of Nebraska-Lincoln
Marjorie Langell: Department of Chemistry, University of Nebraska - Lincoln
Eva Schubert: Department of Electrical and Computer Engineering, University of Nebraska-Lincoln
Mathias Schubert: Department of Electrical and Computer Engineering, University of Nebraska-Lincoln

Abstract

An amendment to this paper has been published and can be accessed via a link at the top of the paper.