BIO Web of Conferences (Jan 2024)

Electron channeling pattern imaging – a novel approach for the determination of wafer offcut angles

  • Han Han,
  • Strakos Libor,
  • Porret Clément,
  • Depauw Valérie,
  • Vystavel Tomas,
  • Richard Olivier,
  • Grieten Eva,
  • Hantschel Thomas

DOI
https://doi.org/10.1051/bioconf/202412907022
Journal volume & issue
Vol. 129
p. 07022

Abstract

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Keywords