Phase Stability and Properties of Ti-Nb-Zr Thin Films and Their Dependence on Zr Addition
Jeonghyeon Yang,
Munkhbayar Baatarsukh,
Joohyeon Bae,
Sunchul Huh,
Hyomin Jeong,
Byeongkeun Choi,
Taehyun Nam,
Jungpil Noh
Affiliations
Jeonghyeon Yang
Department of Mechanical System Engineering, Gyeongsang National University, 38, Cheondaegukchi-gil, Tongyeong 53064, Korea
Munkhbayar Baatarsukh
Department of Energy and Mechanical Engineering and Institute of Marine Industry, Gyeonsang National University, 38, Cheondaegukchi-gil, Tongyeong 53064, Korea
Joohyeon Bae
Department of Energy and Mechanical Engineering and Institute of Marine Industry, Gyeonsang National University, 38, Cheondaegukchi-gil, Tongyeong 53064, Korea
Sunchul Huh
Department of Energy and Mechanical Engineering and Institute of Marine Industry, Gyeonsang National University, 38, Cheondaegukchi-gil, Tongyeong 53064, Korea
Hyomin Jeong
Department of Energy and Mechanical Engineering and Institute of Marine Industry, Gyeonsang National University, 38, Cheondaegukchi-gil, Tongyeong 53064, Korea
Byeongkeun Choi
Department of Energy and Mechanical Engineering and Institute of Marine Industry, Gyeonsang National University, 38, Cheondaegukchi-gil, Tongyeong 53064, Korea
Taehyun Nam
Department of Materials Engineering and Convergence Technology & RIGECT, Gyeonsang National University, 501, Jinju-daero, Jinju 52828, Korea
Jungpil Noh
Department of Energy and Mechanical Engineering and Institute of Marine Industry, Gyeonsang National University, 38, Cheondaegukchi-gil, Tongyeong 53064, Korea
Ternary Ti-Nb-Zr alloys were prepared by a magnetron sputtering method with porous structures observed in some of them. In bulk, in order to control the porous structure, a space holder (NH4HCO3) is used in the sintering method. However, in the present work, we show that the porous structure is also dependent on alloy composition. The results from Young’s modulus tests confirm that these alloys obey d-electrons alloy theory. However, the Young’s modulus of ternary thin films (≈80–95 GPa) is lower than that for binary alloys (≈108–123 GPa). The depth recovery ratio of ternary Ti-Nb-Zr thin films is also higher than that for binary β-Ti-(25.9–34.2)Nb thin film alloys.
