Exploring Volatile Precursors: Synthesis, Characterization and Thermal Properties of Thulium Fluoroacetylacetonate Complexes

Abstract

Five trifluoroacetylacetonate (tfaa−) complexes [Tm(tfaa)3(H2O)]2, [Tm(tfaa)3(H2O)2], [Tm(tfaa)3(H2O)2] · diglyme, [Tm(tfaa)3(DME)] (DME = 1,2-dimethoxyethane) and [TmCl2(tfaa)(diglyme)] (diglyme = bis(2-methoxyethyl) ether) of thulium have been synthesized and characterized by X-ray single-crystal structure analysis and spectroscopic techniques. Thermoanalytical studies at elevated temperatures provide information about their volatility. The results are compared with the hexafluoroacetylacetonate (hfaa−) complexes of thulium known in the literature, which were reported as volatile precursors for CVD application. The reported high volatility of [Tm(hfaa)3(DME)] was confirmed and compared with those of the aqueous complexes which show a lower transport rate. In addition, the new crystal structures of the hexafluoroacetylacetonate complexes [Tm(hfaa)3(H2O)2], [Tm(hfaa)2(tfa)(H2O)2]2 (tfa− = trifluoroacetate), [Tm(hfaa)3(DME)NaCl]2 and Na[Tm(hfaa)4] are presented.

Keywords

• thulium
• β-diketonates
• CVD precursor
• crystal structures
• thermal behavior