Fabrication of Hybrid Microfluidic System on Transparent Substrates for Electrochemical Applications

Abstract

In this work the critical aspects of the process sequence developed for fabrication of hybrid polymer microfluidic systems integrating metal electrode pattern and precisely aligned microfluidic structure are discussed in details. Glass and polycarbonate were considered as primary transparent substrate materials for metal (Au, Pt) electrode deposition and the microchannels were formed in multi-layered SU-8 negative photoresist. Poly(dimethylsiloxane) (PDMS) layer was proposed as cover layer to ensure proper sealing and sample inlet formation.

Keywords

• microfluidics
• transparent substrate
• SU-8
• lithography
• bonding