An efficient route to prepare suspended monolayer for feasible optical and electronic characterizations of two‐dimensional materials
Yuan Huang,
Yun‐Kun Wang,
Xin‐Yu Huang,
Guan‐Hua Zhang,
Xu Han,
Yang Yang,
Yunan Gao,
Lei Meng,
Yushu Wang,
Guang‐Zhou Geng,
Li‐Wei Liu,
Lin Zhao,
Zhi‐Hai Cheng,
Xin‐Feng Liu,
Ze‐Feng Ren,
Hui‐Xia Yang,
Yufeng Hao,
Hong‐Jun Gao,
Xing‐Jiang Zhou,
Wei Ji,
Ye‐Liang Wang
Affiliations
Yuan Huang
Advanced Research Institute of Multidisciplinary Science Beijing Institute of Technology Beijing China
Yun‐Kun Wang
State Key Laboratory for Artificial Microstructure and Mesoscopic Physics School of Physics, Peking University Beijing China
Xin‐Yu Huang
Advanced Research Institute of Multidisciplinary Science Beijing Institute of Technology Beijing China
Guan‐Hua Zhang
State Key Laboratory of Molecular Reaction Dynamics, Dalian Institute of Chemical Physics Chinese Academy of Sciences Dalian China
Xu Han
Advanced Research Institute of Multidisciplinary Science Beijing Institute of Technology Beijing China
Yang Yang
Beijing National Laboratory for Condensed Matter Physics, Institute of Physics Chinese Academy of Sciences Beijing China
Yunan Gao
State Key Laboratory for Artificial Microstructure and Mesoscopic Physics School of Physics, Peking University Beijing China
Lei Meng
Minzu University of China Beijing China
Yushu Wang
National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, Jiangsu Key Laboratory of Artificial Functional Materials, Collaborative Innovation Center of Advanced Microstructures Nanjing University Nanjing China
Guang‐Zhou Geng
Beijing National Laboratory for Condensed Matter Physics, Institute of Physics Chinese Academy of Sciences Beijing China
Li‐Wei Liu
School of Information and Electronics, MIIT Key Laboratory for Low‐Dimensional Quantum Structure and Devices Beijing Institute of Technology Beijing China
Lin Zhao
Beijing National Laboratory for Condensed Matter Physics, Institute of Physics Chinese Academy of Sciences Beijing China
Zhi‐Hai Cheng
Department of Physics and Beijing Key Laboratory of Optoelectronic Functional Materials & Micro‐Nano Devices Renmin University of China Beijing China
Xin‐Feng Liu
National Center for Nanoscience and Technology (NCNST) of China Beijing China
Ze‐Feng Ren
State Key Laboratory of Molecular Reaction Dynamics, Dalian Institute of Chemical Physics Chinese Academy of Sciences Dalian China
Hui‐Xia Yang
School of Information and Electronics, MIIT Key Laboratory for Low‐Dimensional Quantum Structure and Devices Beijing Institute of Technology Beijing China
Yufeng Hao
National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, Jiangsu Key Laboratory of Artificial Functional Materials, Collaborative Innovation Center of Advanced Microstructures Nanjing University Nanjing China
Hong‐Jun Gao
Beijing National Laboratory for Condensed Matter Physics, Institute of Physics Chinese Academy of Sciences Beijing China
Xing‐Jiang Zhou
Beijing National Laboratory for Condensed Matter Physics, Institute of Physics Chinese Academy of Sciences Beijing China
Wei Ji
Department of Physics and Beijing Key Laboratory of Optoelectronic Functional Materials & Micro‐Nano Devices Renmin University of China Beijing China
Ye‐Liang Wang
Advanced Research Institute of Multidisciplinary Science Beijing Institute of Technology Beijing China
Abstract Two‐dimensional (2D) materials are highly sensitive to substrates, interfaces, and the surrounding environments. Suspended 2D materials are free from substrate‐induced effects, thus an ideal approach to study their intrinsic properties. However, it is very challenging to prepare large‐area suspended 2D materials with high efficiency. Here we report a universal method, based on pretreatments of densely patterned hole array substrates with either oxygen‐plasma or gold film deposition, to prepare large‐area suspended mono‐ and few‐layer 2D materials. Multiple structural, optical, and electrical characterization tools were used to fully evaluate the improved performance of various suspended 2D layers. Some of these observations reported in this study are: (1) Observation of a new Raman low frequency mode for the suspended MoS2; (2) Significantly stronger photoluminescence (PL) and second harmonic generation (SHG) signals of suspended WSe2, which enables the study of new optical transition processes; (3) The low energy electron diffraction pattern on suspended MoS2 also exhibits much sharper spots than that on the supported area; and (4) The mobility of suspended graphene device approaches 300 000 cm2 V−1 s−1, which is desirable to explore the intrinsic properties of graphene. This work provides an innovative and efficient route for fabricating suspended 2D materials, and we expect that it can be broadly used for studying intrinsic properties of 2D materials and in applications of hybrid active nanophotonic and electronic devices.