TEM studies of PtSi low Schottky-barrier contacts for source/drain in MOS transistors

• Łaszcz Adam,
• Ratajczak Jacek,
• Czerwinski Andrzej,
• Kątcki Jerzy,
• Breil Nicolas,
• Larrieu Guilhem,
• Dubois Emmanuel

Affiliations

Łaszcz Adam

Institute of Electron Technology, Al. Lotników 32/46, 02-668, Warsaw, Poland

Ratajczak Jacek

Institute of Electron Technology, Al. Lotników 32/46, 02-668, Warsaw, Poland

Czerwinski Andrzej

Institute of Electron Technology, Al. Lotników 32/46, 02-668, Warsaw, Poland

Kątcki Jerzy

Institute of Electron Technology, Al. Lotników 32/46, 02-668, Warsaw, Poland

Breil Nicolas

IEMN, UMR CNRS 8520, Avenue Poincaré, Cité Scientifique, 59652, Villeneuve d’Ascq Cedex, France

Larrieu Guilhem

IEMN, UMR CNRS 8520, Avenue Poincaré, Cité Scientifique, 59652, Villeneuve d’Ascq Cedex, France

Dubois Emmanuel

IEMN, UMR CNRS 8520, Avenue Poincaré, Cité Scientifique, 59652, Villeneuve d’Ascq Cedex, France