Symmetry (Jan 2024)

Deformations of Single-Crystal Silicon Circular Plate: Theory and Experiment

  • Sergey Lychev,
  • Alexander Digilov,
  • Gleb Demin,
  • Evgeney Gusev,
  • Ivan Kushnarev,
  • Nikolay Djuzhev,
  • Vladimir Bespalov

DOI
https://doi.org/10.3390/sym16020137
Journal volume & issue
Vol. 16, no. 2
p. 137

Abstract

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In this paper, the experimental methodology for the single-crystal circular plate deformation measurement and subsequent procedure for the quantitation of its mechanical properties are developed. The procedure is based on a new numerical-analytical solution of non-linear boundary-value problem for finite deformations of a circular anisotropic plate. Using the developed method, a study of the deformation of single-crystal circular plates formed on the basis of a silicon-on-insulator structure was carried out. The values of residual stresses are determined and it is shown that the presence of these stresses increases the flexural rigidity of the plate by several times.

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