IMPROVEMENT OF THERMAL COMPENSATION CIRCUIT FOR PIEZORESISTIVE PRESSURE SENSORS

Abstract

Background. The article discusses integrated piezoresistive converters based on monocrystalline silicon. The operation of the built-in thermal compensation circuit with additional thermistors and the features of its operation are analyzed. Materials and methods. The applicability of thermistors with positive and negative temperature coefficients of resistance to improve the parameters of the thermal compensation circuit is considered. Results and conclusions. Circuit modeling of an improved thermal compensation circuit was carried out over a wide temperature range. The advantages of an improved thermal compensation circuit are shown.

Keywords

• temperature error
• measuring bridge
• piezoresistive converter
• monocrystalline silicon
• icpintegrated pressure converter