Tunable Electrical Properties of Vanadium Oxide by Hydrogen-Plasma-Treated Atomic Layer Deposition

• Helen Hejin Park,
• Thomas J. Larrabee,
• Laura B. Ruppalt,
• James C. Culbertson,
• S. M. Prokes

Affiliations

Helen Hejin Park

Electronics Science and Technology Division, U.S. Naval Research Laboratory (NRL), Washington, District of Columbia, United States

Thomas J. Larrabee

Electronics Science and Technology Division, U.S. Naval Research Laboratory (NRL), Washington, District of Columbia, United States

Laura B. Ruppalt

Electronics Science and Technology Division, U.S. Naval Research Laboratory (NRL), Washington, District of Columbia, United States

James C. Culbertson

Electronics Science and Technology Division, U.S. Naval Research Laboratory (NRL), Washington, District of Columbia, United States

S. M. Prokes

Electronics Science and Technology Division, U.S. Naval Research Laboratory (NRL), Washington, District of Columbia, United States