Application Research of Frequency-Modulated Continuous-Wave Displacement Sensor Based on Zero-Crossing Phase Detecting Algorithm

Abstract

Frequency-modulated continuous-wave (FMCW) interference, as a new technology of laser interferometry, has the advantages of length traceability, large range, high accuracy, simple structure, and optical fiber transmission. Based on the formula of FMCW laser interference displacement, a zero-crossing phase detection algorithm is proposed, which can accurately calculate the initial phase of a cosine signal in a modulation period, and it is successfully applied to the contact laser interference displacement sensor. The experimental results show that the FMCW technology based on the zero-crossing phase detection algorithm can achieve the technical specifications of the contact displacement sensor with a measurement range greater than 15 mm and the standard deviation is less than 0.01 μm. The conversion of noncontact measurement to contact measurement can realize the direct measurement of workpieces with complex surface conditions on the production line, breaking through the limitation of optical measurement and expanding the application of optical fiber interferometry.