Microsystems & Nanoengineering (Nov 2023)

Vertical serpentine interconnect-enabled stretchable and curved electronics

  • Rui Jiao,
  • Ruoqin Wang,
  • Yixin Wang,
  • Yik Kin Cheung,
  • Xingru Chen,
  • Xiaoyi Wang,
  • Yang Deng,
  • Hongyu Yu

DOI
https://doi.org/10.1038/s41378-023-00625-w
Journal volume & issue
Vol. 9, no. 1
pp. 1 – 10

Abstract

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Abstract Stretchable and curved electronic devices are a promising technology trend due to their remarkable advantages. Many approaches have been developed to manufacture stretchable and curved electronics. Here, to allow such electronics to better serve practical applications, ranging from wearable devices to soft robotics, we propose a novel vertical serpentine conductor (VSC) with superior electrical stability to interconnect functional devices through a silicon-based microfabrication process. Conformal vacuum transfer printing (CVTP) technology was developed to transfer the networked platform onto complex curved surfaces to demonstrate feasibility. The mechanical and electrical performance were investigated numerically and experimentally. The VSC interconnected network provides a new approach for stretchable and curved electronics with high stretchability and reliability.