Non-self-sustained discharge with hollow anode for plasma-based surface treatment
Misiruk Ivan O.,
Timoshenko Oleksandr I.,
Taran Valeriy S.,
Garkusha Igor E.
Affiliations
Misiruk Ivan O.
Institute of Plasma Physics, NSC ‘Kharkiv Institute of Physics and Technology’, 1 Akademichna Str., 61108, Kharkiv, Ukraine and Department of Applied Physics and Plasma Physics, School of Physics and Technology, V. N. Karazin Kharkiv National University, 4 Svobody sq., 61022 Kharkiv, Ukraine
Timoshenko Oleksandr I.
Institute of Plasma Physics, NSC ‘Kharkiv Institute of Physics and Technology’, 1 Akademichna Str., 61108, Kharkiv, Ukraine
Taran Valeriy S.
Institute of Plasma Physics, NSC ‘Kharkiv Institute of Physics and Technology’, 1 Akademichna Str., 61108, Kharkiv, Ukraine
Garkusha Igor E.
Institute of Plasma Physics, NSC ‘Kharkiv Institute of Physics and Technology’, 1 Akademichna Str., 61108, Kharkiv, Ukraine and Department of Applied Physics and Plasma Physics, School of Physics and Technology, V. N. Karazin Kharkiv National University, 4 Svobody sq., 61022 Kharkiv, Ukraine
The paper discusses plasma methods for surface modification using the non-self-sustained glow discharge with a hollow anode. This discharge is characterised by low voltage and high values of electron and ion currents. It can be easily excited in vacuum-arc installations that are widely used for coatings deposition. It is shown that such type of discharge may be effectively used for ion pumping, film deposition, ion etching, diffusion saturation of metallic materials, fusion and brazing of metals, and for combined application of above mentioned technologies in a single vacuum cycle.
