APL Materials (Nov 2017)

Adsorption-controlled growth of La-doped BaSnO3 by molecular-beam epitaxy

  • Hanjong Paik,
  • Zhen Chen,
  • Edward Lochocki,
  • Ariel Seidner H.,
  • Amit Verma,
  • Nicholas Tanen,
  • Jisung Park,
  • Masaki Uchida,
  • ShunLi Shang,
  • Bi-Cheng Zhou,
  • Mario Brützam,
  • Reinhard Uecker,
  • Zi-Kui Liu,
  • Debdeep Jena,
  • Kyle M. Shen,
  • David A. Muller,
  • Darrell G. Schlom

DOI
https://doi.org/10.1063/1.5001839
Journal volume & issue
Vol. 5, no. 11
pp. 116107 – 116107-11

Abstract

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Epitaxial La-doped BaSnO3 films were grown in an adsorption-controlled regime by molecular-beam epitaxy, where the excess volatile SnOx desorbs from the film surface. A film grown on a (001) DyScO3 substrate exhibited a mobility of 183 cm2 V−1 s−1 at room temperature and 400 cm2 V−1 s−1 at 10 K despite the high concentration (1.2 × 1011 cm−2) of threading dislocations present. In comparison to other reports, we observe a much lower concentration of (BaO)2 Ruddlesden-Popper crystallographic shear faults. This suggests that in addition to threading dislocations, other defects—possibly (BaO)2 crystallographic shear defects or point defects—significantly reduce the electron mobility.