Influence of the oxidation state of SrTiO3 plasmas for stoichiometric growth of pulsed laser deposition films identified by laser induced fluorescence
Kasper Orsel,
Rik Groenen,
Bert Bastiaens,
Gertjan Koster,
Guus Rijnders,
Klaus-J. Boller
Affiliations
Kasper Orsel
Laser Physics and Nonlinear Optics, Department of Science and Technology, MESA+ Institute for Nanotechnology, University of Twente, Enschede, The Netherlands
Rik Groenen
Inorganic Materials Science, Department of Science and Technology, MESA+ Institute for Nanotechnology, University of Twente, Enschede, The Netherlands
Bert Bastiaens
Laser Physics and Nonlinear Optics, Department of Science and Technology, MESA+ Institute for Nanotechnology, University of Twente, Enschede, The Netherlands
Gertjan Koster
Inorganic Materials Science, Department of Science and Technology, MESA+ Institute for Nanotechnology, University of Twente, Enschede, The Netherlands
Guus Rijnders
Inorganic Materials Science, Department of Science and Technology, MESA+ Institute for Nanotechnology, University of Twente, Enschede, The Netherlands
Klaus-J. Boller
Laser Physics and Nonlinear Optics, Department of Science and Technology, MESA+ Institute for Nanotechnology, University of Twente, Enschede, The Netherlands
By applying two-dimensional laser induced fluorescence (LIF) on multiple plasma constituents, we are able to directly link the oxidation of plasma species in a SrTiO3 plasma for pulsed laser deposition to the stoichiometry and quality of the thin films grown. With spatiotemporal LIF mapping of the plasma species in different background gas compositions, we find that Ti and Sr have to be fully oxidized for a stoichiometric growth of crystalline thin films, which gives new input for modeling surface growth, as well as provides additional control over the exact degree of stoichiometry of thin films.
