Shape‐Controlled Flexible Microelectronics Facilitated by Integrated Sensors and Conductive Polymer Actuators

Abstract

The next generation of biomedical tools requires reshapeable electronics to closely interface with biological tissues. This will offer unique mechanical properties and the ability to conform to irregular geometries while being robust and lightweight. Such devices can be achieved with soft materials and thin‐film structures that are able to reshape on demand. However, reshaping at the submillimeter scale remains a challenging task. Herein, shape‐controlled microscale devices are demonstrated that integrate electronic sensors and electroactive polymer actuators. The fast and biocompatible actuators are capable of actively reshaping the device into flat or curved geometries. The curvature and position of the devices are monitored with strain or magnetic sensors. The sensor signals are used in a closed feedback loop to control the actuators. The devices are wafer‐scale microfabricated resulting in multiple functional units capable of grasping, holding, and releasing biological tissues, as demonstrated with a neuronal bundle.

Keywords

• feedback control
• magnetic sensors
• microactuators
• shapeable electroactive polymers
• soft microrobots